| 大口径非球面元件可控气囊抛光系统 |
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| 引用本文： | 潘日,杨炜,王振忠,郭隐彪,王健,钟波.大口径非球面元件可控气囊抛光系统[J].强激光与粒子束,2012,24(6):1344-1348. |
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| 作者姓名： | 潘日 杨炜 王振忠 郭隐彪 王健 钟波 |
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| 作者单位： | 1.厦门大学 物理与机电工程学院, 福建 厦门 361 005; |
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| 基金项目： | 国家自然科学基金，福建省自然科学基金 |
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| 摘 要： | 根据大口径非球面光学元件的实际加工需要，设计并制造可控气囊抛光系统，并对机构进行运动学仿真，仿真结果表明,气囊自转轴的运动空间可以满足大口径非球面光学元件的连续进动加工要求。为了证明所设计系统的可加工性，以直径320 mm的圆形平面光学元件进行加工实验。经过该气囊抛光工具24 h的抛光后，工件达到较好的面型精度，光学元件的表面粗糙度由0.272减小到0.068(＝632.8 nm)， PV值从1.671降低到0.905。对光学元件的实际加工实验结果表明:可控气囊抛光系统在加工过程中结构稳定性好，符合设计要求，可有效提高加工工件面型精度。
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| 关 键 词： | 大口径非球面光学元件 进动抛光 可控气囊抛光系统 设计及研制 |
| 收稿时间： | 2011/11/23 |
Controlled bonnet polishing system for large aspheric lenses |
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| Pan Ri
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Yang Wei
,
Wang Zhenzhong
,
Guo Yinbiao
,
Wang Jian
,
Zhong Bo.Controlled bonnet polishing system for large aspheric lenses[J].High Power Laser and Particle Beams,2012,24(6):1344-1348. |
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| Authors: | Pan Ri Yang Wei Wang Zhenzhong Guo Yinbiao Wang Jian Zhong Bo |
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| Affiliation: | 1.Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005,China;2.Research Center of Laser Fusion,CAEP,P.O.Box 919-990,Mianyang 621900,China |
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| Abstract: | The paper presents the design and manufacture of controlled bonnet polishing system used for large aspheric lenses polishing. Kinematics simulations of the designed structure show that, the workspace of the spin axis of bonnet tool can meet the requirement of large aspheric lenses polishing with continuous precession processing. A polishing experiment on the circular flat workpiece with a radius of 320 mm has been carried out. The profile accuracy of the workpiece is fine after 24-hour polishing. The surface roughness reduces from 0.272λ to 0.068λ, and the peak-to-valley value reduces from 1.671λ to 0.905λ. The results of the experiment show that the controlled bonnet polishing system is featured with high precision and high stability, meeting the design requirements, and the system can improve the profile accuracy of workpieces effectively. |
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| Keywords: | large aspheric lenses precession finishing controlled bonnet polishing system design and manufacture |
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