| 小型化电感隔离型Marx发生器的研制 |
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| 引用本文： | 焦毅,姜松,王永刚,饶俊峰.小型化电感隔离型Marx发生器的研制[J].强激光与粒子束,2023,35(5):055002-1-055002-6. |
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| 作者姓名： | 焦毅 姜松 王永刚 饶俊峰 |
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| 作者单位： | 1.上海理工大学 机械工程学院，上海 200093 |
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| 基金项目： | 国家重点研发计划项目(2019YFC0119102); 上海市青年科技英才扬帆计划项目(20YF1431100); 上海理工大学-上海交通大学医学院医工交叉重点支持项目(2021005) |
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| 摘 要： | 随着脉冲功率技术的发展，纳秒脉冲电场被逐渐应用到等离子体水处理、不可逆电穿孔肿瘤消融等技术中。为了满足纳秒脉冲的应用需求，电源需要输出十几kV高压，拥有纳秒窄脉宽和快速的上升沿，同时尽量减小电源体积，降低成本。该纳秒脉冲电源采用电感隔离型Marx发生器结构，电路可以实现模块化叠加，电感隔离可以减少开关数量，抬升充电电压，以获得更高的电压输出。所设计的驱动电路仅需一路控制信号和一个直流供电模块，经功率放大和磁隔离后可同时控制所有放电管，该驱动电路结构简单、成本低、体积小，耐压水平高。所设计的24级电源样机，在50 kΩ阻性负载上，可输出0～14 kV电压，频率0.5～1 kHz，脉宽500 ns。该电源主电路的长宽高尺寸仅为23 cm×10 cm×12 cm。
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| 关 键 词： | Marx发生器 脉冲电源 脉冲功率 电感隔离 |
| 收稿时间： | 2022-09-14 |
Development of miniaturized inductor-isolated Marx generator |
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| Affiliation: | 1.School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China2.Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China |
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| Abstract: | With the development of pulsed power technology, nanosecond pulsed electric field has been gradually applied to plasma water treatment, irreversible electroporation for tumor ablation and other technologies. To meet the application requirements of nanosecond pulses, the power supply is required to output high voltage exceeding 10 kV, with narrow nanosecond pulse width and fast rising edge. At the same time, it is required to reduce the size and the cost. The nanosecond pulse power supply is an inductor-isolated Marx generator, whose circuit can realize modular superposition. Inductive isolation can reduce the number of switches and raise the charging voltage to obtain a higher voltage output. The driving circuit has only one control signal and one DC power supply module, which can control all discharge tubes at the same time after power amplification and magnetic isolation. The driving circuit has the advantages of simple structure, low cost, small volume and high voltage resistance. The power supply has 24 stages. Under the condition of 50 kΩ resistive load, high voltage pulses with 500 ns pulse width, amplitude of 0?14 kV and adjustable frequency of 0.5?1 kHz are generated. The size of the main circuit is only 23 cm×10 cm×12 cm. |
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