Study on tapered crossed subwavelength gratings by Fourier modal method |
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Authors: | Chen Xi Zhong Yuan Wang Qing Zhang Ye-Jin and Chen Liang-Hui |
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Affiliation: | Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; National Institute of Metrology, Beijing 100013, China |
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Abstract: | Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ``moth-eye' antireflection surface on silicon, and the numerical result agrees well with the experimental one. |
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Keywords: | tapered crossed subwavelength gratings Fourier modal method staircase approximation eigenvalue functions |
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