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Leakage current reduction by thermal oxidation in Ni/Au Schottky contacts on lattice-matched Ino.18Al0.82N/GaN heterostructures |
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| Affiliation: | [1]State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China [2]Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China |
| Abstract: | leakage current, thermal oxidation, Frenkel-Poole emission |
| Keywords: | leakage current thermal oxidation Frenkel-Poole emission |
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