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Non-contact angle measurement based on parallel multiplex laser feedback interferometry
作者姓名:张松  谈宜东  张书练
作者单位:State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments,Tsinghua University
基金项目:Project supported by the National Natural Science Foundation of China (Grant No. 61036016). The authors thank Ms Xiao Ting for her contribution to the experiment,
摘    要:We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry (PLFI), which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non- cooperative targets. Experimental results show that PLFI has an accuracy of 8" within a range of 1400". The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A.

关 键 词:双频激光干涉仪  接触角测量  激光反馈  多路  并行  超高灵敏度  非接触测量  测量方案

Non-contact angle measurement based on parallel multiplex laser feedback interferometry
Zhang Song,Tan Yi-Dong,and Zhang Shu-Lian.Non-contact angle measurement based on parallel multiplex laser feedback interferometry[J].Chinese Physics B,2014(11):324-328.
Authors:Zhang Song  Tan Yi-Dong  and Zhang Shu-Lian
Affiliation:State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
Abstract:laser feedback, angle measurement, non-cooperative targets
Keywords:laser feedback  angle measurement  non-cooperative targets
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