| Structure distortion,optical and electrical properties of ZnO thin films co-doped with Al and Sb by sol-gel spin coating |
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| 作者姓名： | 钟文武 刘发民 蔡鲁刚 周传仓 丁芃 张嬛 |
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| 作者单位： | Department of Physics, School of Physics and Nuclear Energy Engineering, Key Laboratory of Micro-nanoMeasurement-Manipulation and Physics （Ministry of Education）, Beijing University of Aeronautics and Astronautics, Beijing 100191, China |
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| 基金项目： | Project supported by the Innovation Foundation of Beijing University of Aeronautics and Astronautics for PhD Graduates, China （Grant No. 292122）, and the Equipment Research Foundation of China （Grant No. 373974）. |
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| 摘 要： | ZnO thin films co-doped with Al and Sb with different concentrations and a fixed molar ratio of AlCl 3 to SbCl 3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550°C for 2 h in air. The x-ray diffraction results confirm that the ZnO thin films co-doped with Al and Sb are of wurtzite hexagonal ZnO with a very small distortion, and the biaxial stresses are 1.03×10 8 , 3.26×10 8 , 5.23×10 8 , and 6.97×10 8 Pa, corresponding to those of the ZnO thin films co-doped with Al and Sb in concentrations of 1.5, 3.0, 4.5, 6.0 at% respectively. The optical properties reveal that the ZnO thin films co-doped with Al and Sb have obviously enhanced transmittance in the visible region. The electrical properties show that ZnO thin film co-doped with Al and Sb in a concentration of 1.5 at% has a lowest resistivity of 2.5Ω·cm.
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| 关 键 词： | ZnO thin films co-doped with Al and Sb sol–gel spin-coating method structure distortion optical and electrical properties |
Structure distortion,optical and electrical properties of ZnO thin films co-doped with Al and Sb by sol-gel spin coating |
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| Zhong,Wen-Wu Liu,Fa-Min Cai,Lu-Gang Zhou,Chuan-Cang Ding,Peng Zhang,Huan.Structure distortion,optical and electrical properties of ZnO thin films co-doped with Al and Sb by sol-gel spin coating[J].Chinese Physics B,2010(10):515-519. |
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| Authors: | Zhong Wen-Wu Liu Fa-Min Cai Lu-Gang Zhou Chuan-Cang Ding Peng Zhang Huan |
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| Affiliation: | Department of Physics, School of Physics and Nuclear Energy Engineering, Key Laboratory of Micro-nanoMeasurement-Manipulation and Physics (Ministry of Education), Beijing University of Aeronautics and Astronautics, Beijing 100191, China |
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| Abstract: | ZnO thin films co-doped with Al and Sb, sol-gel spin-coating method, structure distortion, optical and electrical properties |
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| Keywords: | ZnO thin films co-doped with Al and Sb sol-gel spin-coating method structure distortion optical and electrical properties |
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