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Influence of annealing temperature on passivation performance of thermal atomic layer deposition Al_2O_3 films |
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| Authors: | Zhang Xianga Liu Bang-Wua Zhao Yanb Li Chao-Boa Xia Yang |
| Abstract: | annealing atomic layer deposition Al2O3 passivation performance |
| Keywords: | annealing atomic layer deposition AlO passivation performance |
| 本文献已被 CNKI 维普 等数据库收录！ | |
