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Degradation mechanisms for a-InGaZnO thin-film transistors functioning under simultaneous DC gate and drain biases
Affiliation:1.School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China;2.Visionox Technology Co., Ltd, Suzhou 215006, China
Abstract:Degradation of a-InGaZnO thin-film transistors working under simultaneous DC gate and drain bias stress is investigated, and the corresponding degradation mechanism is proposed and verified. The maximum degradation occurs under the bias stress condition that makes the electric field and electron concentration relatively high at the same time. Trapping of hot electrons in the etching-stop layer under the extended drain electrode is proven to be the underlying mechanism. The observed degradation phenomena, including distortion in the transfer curve on a logarithmic scale and two-slope dependence on gate bias on a linear scale, current crowding in the output curve, and smaller degradation in transfer curves measured under large drain bias, can all be well explained with the proposed degradation mechanism.
Keywords:a-IGZO  thin-film transistors  hot-carrier effects  
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