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Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves |
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| Authors: | Xiao Xia;Tao Ye;Sun Yuan |
| Abstract: | low-k film, mechanical character detection, rough surface, rough interface, surface acoustic wave |
| Keywords: | low-k film mechanical character detection rough surface rough interface surface acoustic wave |
| 本文献已被 CNKI 维普 等数据库收录！ | |
