Enhancing the thermal conductivity of polymer-assisted deposited Al2O3 film by nitrogen doping |
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Authors: | Huang Jiang Zhang Yin Pan Tai-Song Zeng Bo Hu Guo-Hua and Lin Yuan |
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Affiliation: | State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China |
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Abstract: | Polymer-assisted deposition technique has been used to deposit Al2O3 and N-doped Al2O3(AlON) thin films on Si(100) substrates.The chemical compositions,crystallinity,and thermal conductivity of the as-grown films have been characterized by X-ray photoelectron spectroscopy(XPS),X-ray diffraction(XRD),and 3-omega method,respectively. Amorphous and polycrystalline Al2O3 and AlON thin films have been formed at 700℃and 1000℃.The thermal conductivity results indicated that the effect of nitrogen doping on the thermal conductivity is determined by the competition of the increase of Al-N bonding and the suppression of crystallinity.A 67%enhancement in thermal conductivity has been achieved for the samples grown at 700℃,demonstrating that the nitrogen doping is an effective way to improve the thermal performance of polymer-assisted-deposited Al2O3 thin films at a relatively low growth temperature. |
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Keywords: | nitrogen-doped Al2O3 thin film thermal conductivity polymer-assisted deposition |
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