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Characterization of tetragonal distortion in a thick Al0.2Ga0.8N epilayer with an AIN interlayer by Rutherford backscattering/channeling |
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| Affiliation: | [1]State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China; [2]Chinese Academy of Engineering Physics, Mianyang 621900, China |
| Abstract: | AlGaN, Rutherford backscattering/channeling, elastic strain |
| Keywords: | AlGaN Rutherford backscattering/channeling elastic strain |
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