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| Mechanism of titanium-nitride chemical mechanical polishing | |
| 作者姓名： | 冯道欢 王若冰 徐傲雪 徐帆 汪为磊 刘卫丽 宋志棠 |
| 作者单位： | State Key Laboratory of Functional Materials for Informatics;University of the Chinese Academy of Sciences |
| 基金项目： | Project supported by the National Natural Science Foundation of China(Grant Nos.61874178 and 61874129);the National Key Research and Development Program of China(Grant Nos.2018YFB0407500 and 2017YFA0206101)。 |
| 摘 要： | |
| 关 键 词： | TIN chemical mechanical polishing MECHANISM |
| 本文献已被 CNKI 维普 等数据库收录！ | |
