|
|||||
|
|
Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath |
|
| Authors: | Xu Jin-Zhou Shi Jian-Jun Zhang Jing Zhang Qi Nakamura Keji and Sugai Hideo |
| Affiliation: | Department of Applied Physics, College of Science, Donghua University, Shanghai 201620, China; Department of Electrical Engineering, School of Engineering, Chubu University 1200 Matsumoto-cho, Kasugai, Aichi 487-8501, Japan |
| Abstract: | The hairpin probe using microwave resonance in plasma is applicable to high pressure 1.33×103—1.01×105 Pa)) as developed recently. In this work, an analytic model of the hairpin resonator probe surrounded by a thin dielectric layer and a sheath layer is proposed. The correction factor due to these surroundings is analytically found and confirmed by electromagnetic field finite difference time domain simulation, thus enabling the accurate measurement of electron density in a high-pressure non-equilibrium uniform discharge. |
| Keywords: | hairpin resonator probe simulation high-pressure plasma transmission line model |
| 本文献已被 CNKI 维普 等数据库收录！ | |
| 点击此处可从《中国物理 B》浏览原始摘要信息 | |
| 点击此处可从《中国物理 B》下载免费的PDF全文 | |
