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用于大孔径凸非球面检测的部分补偿透镜的优化设计
引用本文:孟晓辰,祝连庆.用于大孔径凸非球面检测的部分补偿透镜的优化设计[J].应用光学,2016,37(5):747-751.
作者姓名:孟晓辰  祝连庆
作者单位:1.北京信息科技大学 光电测试技术北京市重点实验室,北京 100101
基金项目:教育部“长江学者与创新团队”发展计划(IRT1212);北京市教委科研计划项目(KM201511232006)
摘    要:针对部分补偿法和子孔径拼接技术对大孔径凸非球面进行测量时,部分补偿透镜的优化设计是关键技术之一,基于ZEMAX软件对用于大孔径凸非球面的部分补偿透镜进行了优化设计,以波前斜率作为优化目标,通过直接观察弥散圆半径对全口径的光线进行优化。设计结果表明,用结构简单的单片部分补偿透镜即可实现对大孔径凸非球面的面形测量,在不同的子孔径区域,部分补偿系统在理想焦面处的弥散圆最大半径均小于165 μm,满足设计要求,验证了结合部分补偿法和子孔径拼接技术测量大孔径凸非球面的可行性。

关 键 词:光学设计    部分补偿透镜    大孔径凸非球面    弥散圆
收稿时间:2016-02-03

Optimization design of partially compensating lens for large aperture convex aspheric surface testing
Affiliation:1.Beijing Key Laboratory of Optoelectronic Instrument Technology,Beijing Information Science and Technology University,Beijing 100101,China
Abstract:Optimization design of partially compensating lens is one of the key problems for large aperture convex aspheric surface testing using part compensating lens and sub aperture stitching. A design method for the part compensating lens based on ZEMAX was proposed, which took the slope of wave front as the optimization objective, and optimized the lights on the full aperture by observing the radius of dispersive spot. The results indicate that, the large aperture convex aspheric surface can be tested by a simple single part compensating lens. In different areas of the sub aperture, the maximum radius of the dispersive spot in the ideal focal plane is less than 165 μm, which can always achieve the requirement, verifing the feasibility of testing the large aperture convex aspheric surface by part compensating lens and sub aperture stitching.
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