| 基于PDMS的光纤端面微纳结构转移法 |
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| 引用本文： | 侯天斐,赵复生,王斌,王硕,高天元.基于PDMS的光纤端面微纳结构转移法[J].应用光学,2020,41(3):631-636. |
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| 作者姓名： | 侯天斐 赵复生 王斌 王硕 高天元 |
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| 作者单位： | 1.长春理工大学 光电工程学院，吉林 长春 130028 |
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| 基金项目： | 中科院重点部署项目（ZDRW-XH-09-3） |
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| 摘 要： | 微纳光纤传感器将微纳加工与光纤传感技术有机结合，具有重大的科研意义和产业化潜力。现有加工方法无法达到任意复杂三维结构可制备化，从而限制了微纳光纤传感器的发展。介绍了一种新型微纳加工方法，该方法在聚二甲基硅氧烷（PDMS）薄膜上实现微纳结构的制备，之后将薄膜连同微纳结构一同转移到光纤端面，在光纤端面实现人为定义三维立体微纳结构。通过在扫描电镜下对制备的样品进行检测，确认PDMS薄膜及其上三维结构可被无损转移至光纤端面。该方法具有易制备、低成本且可加工三维微纳结构的特点。
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| 关 键 词： | 光纤 三维微纳结构 微纳加工 聚二甲基硅氧烷 干涉曝光 |
| 收稿时间： | 2019-10-21 |
Micro-nano structure transfer method of optical fiber end face based on PDMS |
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| Affiliation: | 1.School of Electro-Optical Engineering, Changchun University of Science and Technology, Changchun 130028, China2.Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China |
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| Abstract: | Micro-nano optical fiber sensor combines with micro-nano processing and optical fiber sensing technology, which has great significance in scientific research and industrilization potential. The preparation of the arbitrary complex three-dimensional (3D) structures cannot be achieved by the existing processing methods, thereby limiting the development of the micro-nano optical fiber sensor. A new processing method of micro-nano was proposed, which could achieve the preparation of the micro-nano structure on the polydimethylsiloxane (PDMS) thin films, then transferred the thin films and the micro-nano structure to the end face of the optical fiber, and the 3D micro-nano structure with artificial definition was achieved. The prepared samples are examined under the scanning electron microscope, and it is confirmed that the PDMS thin film and its 3D structure can be transferred to the end face of the optical fiber without loss. The proposed method has the characteristics of easy preparation, low cost and processing 3D micro-nano structure. |
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