| 基于频域变换的MEMS声学薄膜缺陷检测算法 |
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| 引用本文： | 魏冬,桑梅,禹敏慧,黄耀慷,刘红光,刘铁根.基于频域变换的MEMS声学薄膜缺陷检测算法[J].应用光学,2021,42(6):1086-1091. |
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| 作者姓名： | 魏冬 桑梅 禹敏慧 黄耀慷 刘红光 刘铁根 |
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| 作者单位： | 1.天津大学 精密仪器与光电子工程学院，天津 300072 |
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| 基金项目： | 国家重点研发计划项目（2018YFF01013203） |
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| 摘 要： |
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| 关 键 词： | MEMS声学薄膜 傅里叶变换 周期性结构纹理 Haar小波分解 缺陷检测 |
| 收稿时间： | 2021-04-25 |
Defect detection algorithm of MEMS acoustic film based on frequency domain transformation |
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| Affiliation: | 1.School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China2.Key Laboratory of Opto-electronic Information Technology (Ministry of Education), Tianjin University, Tianjin 300072, China3.Tianjin Institute of Metrological Supervision and Testing, Tianjin 300192, China |
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| Abstract: | The micro-electro-mechanical system (MEMS) acoustic film has extremely high requirements for tape-out, storage and packaging environments, and its surface defects will affect the quality and performance of MEMS devices. The image defects detection is an effective non-contact optical detection means that can effectively improve the yield rate of MEMS production. However, the periodic structure texture of the MEMS devices surface will interfere with defect detection. A acoustic film defect detection algorithm based on frequency domain transformation was proposed. By calculating the gradient distribution of spectrogram and establishing the Boolean mask, the dominant frequency components corresponding to the periodic structure texture were eliminated. The residual spectrograms were subjected to a Fourier inversion to reconstruct the defect images. The reconstructed images were decomposed by single-layer Haar wavelet to obtain the low-frequency sub-band image and the defect information was extracted by simple threshold segmentation. The defect detection effects of different types of MEMS acoustic film were showed. The experimental results show that it is reasonable to set the zoom constant in the range of 0.7~1.0. |
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