| 子孔径拼接中系统误差的修正方法 |
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| 引用本文： | 吴世霞,田爱玲,刘丙才,张鹏飞.子孔径拼接中系统误差的修正方法[J].应用光学,2013,34(4):639-643. |
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| 作者姓名： | 吴世霞 田爱玲 刘丙才 张鹏飞 |
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| 作者单位： | 1.西安工业大学陕西省薄膜与光学检测技术重点实验室,陕西 西安 710032; |
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| 基金项目： | 国家自然科学基金，陕西省教育厅项目 |
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| 摘 要： | 为了提高大口径光学元件子孔径拼接测量的检测精度，提出一种平面绝对测量技术，修正子孔径拼接过程中产生的系统误差。利用改进的三面互检法获得参考平面的面形数据，采用这些测量数据构建基于Zernike多项式的参考面面形误差修正波面，在拼接过程中运用误差修正波面对获得的子孔径测量数据进行实时修正，并与全口径直接测量结果进行对比，结果PV（peak value，PV,峰谷值）误差从0.072 1 减少到0.028 6 。结果表明该方法有效减少了参考平面系统误差对拼接测量精度的影响，提高了大口径光学元件的检测精度。
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| 关 键 词： | 光学测量 子孔径拼接 平面绝对检验 三平面互检 |
System error correcting method in sub-aperture stitching |
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| WU Shi-xia
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TIAN Ai-ling
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LIU Bing-cai
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ZHANG Peng-fei.System error correcting method in sub-aperture stitching[J].Journal of Applied Optics,2013,34(4):639-643. |
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| Authors: | WU Shi-xia TIAN Ai-ling LIU Bing-cai ZHANG Peng-fei |
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| Affiliation: | 1.Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test,Xi-an Technological University,Xi-an 710032,China;2.Optical Bioimaging Lab,National University of Singapore,Singapore 117574,Singapore |
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| Abstract: | In order to improve the detection accuracy of the measurement of large aperture optics stitching, a simple and effective absolute measurement was proposed to amend the system error of the sub-aperture stitching measurements. Firstly, an improved three-flat test was used to obtain the surface shape data of the reference plane and the surface error wave-front based on the Zernike polynomial was established which was used to correct the error of the sub aperture measurement data. Then the directly measured values were compared with the full aperture surface stitching results, and the surface error peak value(DV) was reduced from 0.072 1 λ to 0.028 6 λ. The results show that the method is effective in reducing the system error that caused by the reference plane and can effectively improve the detection accuracy of the large aperture optics stitching. |
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| Keywords: | optical measurement sub-aperture stitching plane absolute test three-flat test |
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