| 刻划光栅刻线弯曲误差在线修正技术研究 |
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| 引用本文： | 杨超,周鹏,周润森,高旭,薛常喜.刻划光栅刻线弯曲误差在线修正技术研究[J].应用光学,2019,40(4):658-662. |
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| 作者姓名： | 杨超 周鹏 周润森 高旭 薛常喜 |
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| 作者单位： | 1.长春理工大学 光电工程学院, 吉林 长春 130022 |
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| 基金项目： | 国家自然科学基金51505078国家自然科学基金61505204长春理工大学青年科学基金XQNJJ-2017-062018年“十三五”科学技术项目JJKH20181111KJ |
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| 摘 要： | 刻划光栅存在刻线弯曲误差,将直接影响光栅的衍射波前质量。通过构建光栅刻线弯曲误差与衍射波前的映射关系,搭建了光栅刻线弯曲误差的实时测量光路,论述了光栅刻划机主动控制技术原理,将光栅刻划机主动控制技术用于光栅刻线弯曲误差的在线补偿。通过对比光栅刻划实验验证该方法的可行性。上述方法能够准确提取并有效补偿光栅刻线弯曲误差,将光栅衍射波前由0.074 λ提高到0.038 λ,提高了48.6%,同时有效地解决了光栅表面弯曲问题。其研究结果可用于提高机械刻划光栅质量,具有重要的理论及应用价值。
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| 关 键 词： | 刻划光栅 测量光路 刻线弯曲 刻划误差 |
| 收稿时间： | 2018-12-03 |
Research on on-line correction technology of ruled grating curved error |
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| YANG Chao,ZHOU Peng,ZHOU Runsen,GAO Xu,XUE Changxi.Research on on-line correction technology of ruled grating curved error[J].Journal of Applied Optics,2019,40(4):658-662. |
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| Authors: | YANG Chao ZHOU Peng ZHOU Runsen GAO Xu XUE Changxi |
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| Affiliation: | 1.School of Opto-Electronic Engneering, Changchun University of Science and Technology, Changchun 130022, China2.Key Laboratory of Photoelectric Measurement and Control and Optical Information Transmission Technology(Ministry of Education), Changchun Institute of Optics, Fine Mechanics and Physics, CAS, Changchun 130033, China |
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| Abstract: | The groove curved error in the grating can directly affect the diffraction wavefront quality of grating. Aiming at the problem, we established the mapping relationship between the grating curve error and the diffraction wavefront, built the optical path for measuring the curve error of the grating line, discussed the principle of the active control technology of the grating ruling machine, and used the active control technology to compensate the grating curve error on-line. Finally, we carried out the contrastive experiment to verify the feasibility of the method. The above method can compensate grating curved errors accurately and effectively, and the grating wavefront can be increased from 0.074 λ to 0.038 λ, increased by 48.6%, at the same time it can effectively solve the problem of the curve of the grating surface. The research results can be used to improve the quality of mechanical ruling grating, which has important theoretical and applied values. |
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| Keywords: | ruled grating measurement optical path groove curve error ruling errors |
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