| 三维轮廓扫描法测量透镜曲率半径的实验研究 |
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| 引用本文： | 定翔,李飞,洪宝玉.三维轮廓扫描法测量透镜曲率半径的实验研究[J].应用光学,2012,33(4):761-765. |
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| 作者姓名： | 定翔 李飞 洪宝玉 |
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| 作者单位： | 中国计量科学研究院 医学与生物计量研究所, 北京 100013 |
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| 摘 要： | 三维轮廓扫描方法可通过连续扫描透镜表面三维空间形貌，拟合得到其曲率半径值。该方法具有测量精度高、可任意选定测量区域、测量力微弱、对光学表面划伤可忽略等优点。通过实验，研究了三维轮廓扫描法测量透镜曲率半径的精度，并分析了测量区域大小、扫描间距等因素对测量精度的影响。实验结果表明，该方法测量凸、凹球面透镜的曲率半径的相对重复性可达到1×10-6。
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| 关 键 词： | 曲率半径测量 三维轮廓扫描 重复性标准差 最小二乘拟合 |
| 收稿时间： | 2011/10/20 |
Curvature radius measurement by three-dimension profilometry |
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| DING Xiang
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LI Fei
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HONG Bao-yu.Curvature radius measurement by three-dimension profilometry[J].Journal of Applied Optics,2012,33(4):761-765. |
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| Authors: | DING Xiang LI Fei HONG Bao-yu |
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| Affiliation: | Division of Medical and Biological Measurement, National Institute of Metrology, Beijing 100013, China |
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| Abstract: | Accurate measurement of curvature radius can be realized by three-dimension profilometry by scanning and fitting the surface topography of lenses. It takes the advantages of high accuracy, variable scanning area, tiny contact force and neglectable scratch to optical surface. Precision of curvature radius measurement by three-dimension profilometry is investigated, as well the influence of scanning area size and scanning intervals on the precision are discussed. Experimental results indicate that the standard deviation of relative repeatability can achieve as high as 1×10-6 in curvature radius measurement in both convex and concave lenses. |
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| Keywords: | curvature radius measurement three-dimension profilometry standard deviation of repeatability least square fitting |
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