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Effect of CO on Characteristics of AlGaN/GaN Schottky Diode
Authors:FENG Chun  WANG Xiao-Liang  YANG Cui-Bai  XIAO Hong-Ling  ZHANG Ming-Lan  JIANG Li-Juan  TANG Jian  HU Guo-Xin  WANG Jun-Xi  WANG Zhan-Guo
Affiliation:Materials Science Center, Institute of Semiconductors, Chinese Academy of Sciences; Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Abstract:Pt Schottky diode gas sensors for CO are fabricated using AlGaN/GaN high electron mobility transistor (HEMTs) structure. The diodes show a remarkable sensor signal (3mA, in N2; 2mA in air ambient) biased 2V after 1% CO is introduced at 50°C. The Schottky barrier heights decrease for 36meV and 27meV in the two cases respectively. The devices exhibit a slow recovery characteristic in air ambient but almost none in the background of pure N2, which reveals that oxygen molecules could accelerate the desorption of CO and offer restrictions to CO detection.
Keywords:73.61.Ey  07.07.Df  73.40.Ns
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