Dynamic Scaling in Growth of ZrO2 Thin Films Prepared by Electronic Beam Evaporation 期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Dynamic Scaling in Growth of ZrO2 Thin Films Prepared by Electronic Beam Evaporation

摘要：
关键词：	ZrO2薄膜氧化锆薄膜电子束蒸发原子力显微镜动力学缩放特征薄膜生长