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High-voltage SOI lateral MOSFET with a dual vertical field plate |
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| Authors: | Fan Jie Zhang Bo Luo Xiao-Rong Li Zhao-Ji |
| Affiliation: | Slate Key Laboralory of Elecoonic Thin Films and Integrated Devices,University of Electronic Science and Technology of China, Chengdu 610054, China |
| Abstract: | breakdown voltage, specific on-resistance, vertical field plate, oxide trench |
| Keywords: | breakdown voltage specific on-resistance vertical field plate oxide trench |
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