A numerical simulation of surface wave excitation in a rectangular planar-type plasma source |
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| Authors: | Chen Zhao-Quan Liu Ming-Hai Lan Chao-Hui Chen Wei Tang Liang Luo Zhi-Qing Yan Bao-Rong Lü Jian-Hong Hu Xi-Wei |
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| Affiliation: | Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education, College of Electrical & Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China |
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| Abstract: | ![]()
The principle of surface wave plasma discharge in a rectangularcavity is introduced simply based on surface plasmon polaritontheory. The distribution of surface-wave electric field at theinterface of the plasma-dielectric slab is investigated by using thethree-dimensional finite-difference time-domain method (3D-FDTD)with different slot-antenna structures. And the experimental imageof discharge with a novel slot antenna array and the simulation ofthe electric field with this slot antenna array are both displayed.Combined with the distribution of surface wave excitation andexperimental results, the numerical simulation performed by using3D-FDTD is shown to be a useful tool in the computer-aided antennadesign for large area planar-type surface-wave plasma sources. |
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| Keywords: | surface wave plasma numericalsimulation three-dimensional finite-difference time-domain method surface plasmons polaritons |
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