| 空心聚苯乙烯微球电沉积金工艺 |
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| 引用本文： | 孙敬远, 张云望, 杜凯, 等. 空心聚苯乙烯微球电沉积金工艺[J]. 强激光与粒子束, 2010, 22(12). |
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| 作者姓名： | 孙敬远 张云望 杜凯 万小波 肖江 张伟 陈静 张林 |
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| 作者单位： | 1.西南科技大学 材料科学与工程学院, 四川 绵阳 621 01 0;;;2.中国工程物理研究院 激光聚变研究中心, 四川 绵阳621 900;;;3.电子科技大学 微电子与固体电子学院, 成都 61 0054 |
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| 基金项目： | 中国工程物理研究院发展基金项目 |
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| 摘 要： | 采用自行设计的微球电沉积装置，建立了空心聚苯乙烯(PS)微球的电化学沉积金工艺。实验条件为：电源输出电压0.7~0.8 V，电流密度2.0 mA·cm-2，镀液温度45 ℃，阴极转速250 r·min-1，镀液流速7 mL·min-1·cm-2。在此工艺条件下制得的空心金微球对称性和厚度均匀性良好，表面粗糙度低于500 nm，微球表面沉积金速率约为6 μm·h-1。
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| 关 键 词： | 电沉积 空心微球 金 靶丸 沉积速率 |
| 收稿时间： | 1900-01-01; |
Electrodepositing of Au on hollow PS micro-spheres |
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| sun jingyuan, zhang yunwang, du kai, et al. Electrodepositing of Au on hollow PS micro-spheres[J]. High Power Laser and Particle Beams, 2010, 22. |
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| Authors: | Sun Jingyuan Zhang Yunwang Du Kai Wan Xiaobo Xiao Jiang Zhang Wei Chen Jing Zhang Lin |
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| Affiliation: | 1. School of Material Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China;;;2. Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China;;;3. School of Micro-Electronics and Solid Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China |
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| Abstract: | Using the self-regulating new micro-sphere electrodepositing device, the techniques of electrodepositing gold on hollow PS micro-spheres were established. The experiment was carried out under the following conditionsvoltage was about 0.7~0.8 V, current density was 2.0 mA·cm-2, the temperature was 45 ℃, cathode rotating rate was 250 r·min-1, flow rate of the solution was 7 mL·min-1·cm-1. Hollow gold plated micro-spheres were prepared with well spherical symmetr, uniform thickness and surface smoothness under 500 nm. The speed of the gold depositing was 6 μm·h-1. |
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| Keywords: | hollow micro-sphere gold target depositing speed |
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