Design,fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams |
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| Affiliation: | 1.Institute of Materials, China Academy of Engineering Physics, Mianyang 621000, China;2.Institute of Microelectronics, Peking University, Beijing 100871, China;3.National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China |
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| Abstract: | For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150μm×150μm) and beams (100μm×25μm), the transition temperature (Tc) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1. |
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| Keywords: | transition-edge sensor Ti/Au superconductivity film microfabrication deformation of suspended structure |
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