| Abstract: | We report on the fabrication and performance of a room-temperature NO2gas sensor based on a WO3nanowires/porous silicon hybrid structure. The W18O49nanowires are synthesized directly from a sputtered tungsten film on a porous silicon(PS) layer under heating in an argon atmosphere. After a carefully controlled annealing treatment, WO3nanowires are obtained on the PS layer without losing the morphology. The morphology, phase structure, and crystallinity of the nanowires are investigated by using field emission scanning electron microscopy(FESEM), X-ray diffractometer(XRD), and high-resolution transmission electron microscopy(HRTEM). Comparative gas sensing results indicate that the sensor based on the WO3nanowires exhibits a much higher sensitivity than that based on the PS and pure WO3nanowires in detecting NO2gas at room temperature. The mechanism of the WO3nanowires/PS hybrid structure in the NO2sensing is explained in detail. |
