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Occurrence and elimination of in-plane misoriented crystals in AIN epUayers on sapphire via pre-treatment control |
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| Affiliation: | [1]Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China; [2]Jiangsu Key Laboratory of Application Specific Integrated Circuit Design, Nantong University, Nantong 226019, China |
| Abstract: | AlN, misoriented, polar, nitridation |
| Keywords: | AlN misoriented polar nitridation |
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