| 溴甲烷的等离子体发射光谱测量 |
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| 引用本文： | 翁国峰,马志斌.溴甲烷的等离子体发射光谱测量[J].强激光与粒子束,2011,23(12):49-50. |
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| 作者姓名： | 翁国峰 马志斌 |
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| 作者单位： | 1.武汉工程大学 材料科学与工程学院, 湖北省等离子体化学与新材料重点实验室, 武汉 430073 |
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| 摘 要： | 利用脉冲射频空心阴极等离子体源激发含溴甲烷的工作气体产生等离子体，采用HR4000型高分辨力光谱仪测量了等离子体的发射光谱。通过光谱比较，在等离子体发射光谱图中得到了位于635.07,700.52 nm的溴原子的特征峰,并实验研究了工作气压和溴甲烷密度对溴原子特征峰强度的影响。实验结果表明:在相同的溴甲烷密度下，溴原子的特征峰强度随气压的升高而降低；在相同的气压条件下，溴原子的特征峰强度随溴甲烷密度的升高而升高；溴甲烷密度测量的精度高于1 g/m3。
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| 关 键 词： | 空心阴极 脉冲射频 等离子体发射光谱 溴甲烷 特征峰 |
Plasma emission spectroscopy of methyl bromide |
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| Weng Guofeng
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Ma Zhibin.Plasma emission spectroscopy of methyl bromide[J].High Power Laser and Particle Beams,2011,23(12):49-50. |
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| Authors: | Weng Guofeng Ma Zhibin |
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| Affiliation: | 1.Province Key Laboratory of Plasma Chemistry and Advanced Materials,School of Materials Science and Technology,Wuhan Institute of Technology,Wuhan 430073,China |
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| Abstract: | A pulsed radio frequency hollow cathode plasma source was used to excite working gas containing methyl bromide and the plasma emission spectra were measured by HR4000 high-resolution spectrometer. Two characteristic peaks of bromine atom respectively at 635.07 nm and 700.52 nm were observed. The influence of gas pressure and concentration of methyl bromide on the intensity of the two characteristic peaks was investigated. The results show that the intensity the two characteristic peaks decreases with the increasing of gas pressure at the same concentration of methyl bromide, and increases with the increasing of the concentration under the same gas pressure. The accuracy of methyl bromide concentration measurement can be better than 1 g/m3. |
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| Keywords: | pulsed radio frequency plasma emission spectroscopy methyl bromide characteristic peaks |
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