| Compact Arrayed-Waveguide Grating on Silicon-on-Insulator with Integrated Waveguide Turning Mirrors |
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| 作者姓名： | 李广波 龚昭 贾科淼 龙文华 杨建义 江晓清 王跃林 王明华 |
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| 作者单位： | [1]Department of Information and Electronic Engineering and State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027 [2]State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Intbrmation Technology, Chinese Academy of Sciences, Shanghai 200050 [3]Zhejiang University City College, Hangzhou 310015 |
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| 基金项目： | Sponsored by the National Natural Science Foundation of China under Grant Nos 60377030 and 60436020, the Scientific Research Foundation for the Returned 0verseas Chinese Scholars, the Shanghai Applied Material R＆D Fund under Grant No 0417, and the Key Project of the Ministry of Education of China. |
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| 摘 要： | A compact arrayed-waveguide grating （AWG） on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors （WITMs）. By properly setting the incident angle with the value of 45°, the effective area of the WITM AWG is only 1.15 cm×1.15 cm with the arrayed waveguide area of 0.6cm×0.6cm. The crosstalk of the fabricated 1×6 AWG is better than -19 dB. The on-chip insertion loss is about -8.8 dB and the output nonuniformity is less than 0.6 dB. The polarization-dependent central wavelength shift is about 0.048nm and the polarization dependent loss is neglectable.
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| 关 键 词： | 紧密阵列波导光栅 硅绝缘体 波导转换镜 偏振损耗 |
| 收稿时间： | 2005-08-15 |
| 修稿时间： | 2005-08-15 |
Compact Arrayed-Waveguide Grating on Silicon-on-Insulator with Integrated Waveguide Turning Mirrors |
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| LI Guang-Bo, GONG Zhao, JIA Ke-Miao, LONG Wen-Hua, YANG Jian-Yi, JIANG Xiao-Qing, WANG Yue-Lin, WANG Ming-Hua.Compact Arrayed-Waveguide Grating on Silicon-on-Insulator with Integrated Waveguide Turning Mirrors[J].Chinese Physics Letters,2005,22(12):3100-3103. |
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| Authors: | LI Guang-Bo GONG Zhao JIA Ke-Miao LONG Wen-Hua YANG Jian-Yi JIANG Xiao-Qing WANG Yue-Lin WANG Ming-Hua |
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