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六自由度气囊抛光机器人模态分析与中频误差抑制北大核心CSCD
引用本文:陆锋,王振忠,黄雪鹏,雷鹏立.六自由度气囊抛光机器人模态分析与中频误差抑制北大核心CSCD[J].强激光与粒子束,2022,34(11):119001-1-119001-10.
作者姓名:陆锋  王振忠  黄雪鹏  雷鹏立
作者单位:1.厦门大学 航空航天学院,福建 厦门 361005
基金项目:深圳市科技计划项目(JCYJ20180306172924636)
摘    要:针对六自由度串联式关节机器人气囊抛光系统因刚度不足引起的加工振动以及引入中频误差的问题,以IRB 6700机器人作为研究对象,基于Ansys Workbench建立模态分析模型,并结合实验分析机器人气囊抛光系统工况频带内动态特性,实验与仿真结果共同表明,机器人气囊抛光系统在工况频带至少存在5阶模态,且共振时机器人末端抖动幅值为mm级,机器人加工严重受限。同时针对机器人气囊抛光系统先进光学元件抛光工艺应用,设计一种阻尼抑振气囊工具头,与普通气囊工具头进行定点抛光与整面抛光对比实验。结果表明:抑振气囊头定点抛光斑粗糙度与频谱幅值普遍低于普通气囊工具头,引入的中频误差较一般气囊工具头低40%,抛光优化效果显著。

关 键 词:气囊抛光机器人  中频误差  模态分析  光学元件抛光
收稿时间:2022-01-06

Modal analysis and mid-spatial-frequency errors suppression of 6-DOF bonnet polishing robot
Affiliation:1.School of Aerospace Engineering, Xiamen University, Xiamen 361005, China2.Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China
Abstract:Aiming at the insufficient stiffness of the bonnet polishing system of the six-degree-of-freedom tandem joint robot, which may cause vibration and further mid-spatial-frequency errors, used we the IRB 6700 robot as the research object, established the modal analysis model based on Ansys Workbench and combined experiment to analyze the dynamic characteristics of the robot bonnet polishing system in the working condition frequency range. The experimental and simulation results together show that the robot bonnet polishing system has at least 5 modes in the working condition frequency range, and the jitter amplitude at the end of the robot is millimeter-level when the resonance occurs. Robot processing is severely restricted. In addition, for the application of advanced optical component polishing technology in the robotic bonnet polishing system, a vibration suppression bonnet tool was designed, and the fixed-point polishing and whole-surface polishing comparison experiments were carried out with the ordinary bonnet tool. The results show that the RMS and spectral amplitude of the fixed-point polishing spot of the vibration suppression bonnet are generally lower than that of the ordinary bonnet, and the introduced mid-spatial-frequency errors PSD is 40% lower than that of general bonnet polishing.
Keywords:
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