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Improvement of A1N Film Quality by Controlling the Coalescence of Nucleation Islands in Plasma-Assisted Molecular Beam Epitaxy |
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| Authors: | ZHANG Chen HAO Zhi-Biao REN Fan HU Jian-Nan LUO Yi |
| Affiliation: | State Key Laboratory on Integrated Optoelectronics//Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084 |
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