Phase zone photon sieve |
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| Authors: | Jia Jia and Xie Chang-Qing |
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| Affiliation: | Key Laboratory of Nano-Fabrication and Novel Device Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China |
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| Abstract: | A novel diffractive optical element, named phase zone photon sieve
(PZPS), is presented. There are three kinds of phase plates in
PZPSs: PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own
structure and is made on quartz substrate by etching. The three
PZPSs have stronger diffraction peak intensity than a photon sieve
(PS) when the margin pinhole and zone line width are kept the same.
The PZPS3 can produce a smaller central diffractive spot than the
ordinary PS with the same number of zones on the Fresnel zone plate.
We have given the design method for and the simulation of PZPS and
PS. PZPS has potential applications in optical maskless lithography. |
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| Keywords: | photon sieve Fresnel zone
plate diffractive optics |
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