| 基于聚焦物镜与PSD的激光对中测量方法研究 |
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| 引用本文： | 章逸舟,鲁远甫,陈良培,佘荣斌,马天悦,刘先名.基于聚焦物镜与PSD的激光对中测量方法研究[J].应用光学,2017,38(2):327-330. |
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| 作者姓名： | 章逸舟 鲁远甫 陈良培 佘荣斌 马天悦 刘先名 |
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| 作者单位： | 1.中国科学院深圳先进技术研究院，深圳 518055 |
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| 基金项目： | 深圳市科技计划项目CXZZ20140609162846202 |
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| 摘 要： | 针对传统激光对中方法数学模型复杂、求解困难的不足，提出一种基于聚焦物镜与PSD的激光对中测量方法。该方法利用光学系统中视场与焦距的关系以及相似三角形的原理得到不对中的角度偏差和平行偏差，测量原理简单，求解方便。实验结果表明，当平行偏量和角度偏量的测量范围分别为0.5 mm~1.5 mm，0.047 7°~0.143 2°时，平行偏量测量误差范围为0.035 mm~0.207 mm，角度测量误差范围为0.000 2°~0.012 8°。最后对系统测量误差进行分析并提出一种消除安装误差影响的方法，给出了计算公式。
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| 关 键 词： | 轴对中 激光对中 角度偏量测量 平行偏量测量 聚焦物镜 PSD |
| 收稿时间： | 2016-07-27 |
Laser alignment measurement method based on focusing objective and PSD |
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| Affiliation: | 1.Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China2.The Chinese University of Hong Kong, Hong Kong 999077, China3.Biomedical Engineering Laboratory for Photoelectric Sensing Technology, Shenzhen 518055, China4.Shenzhen yateks optical electronic technology corporation, Shenzhen 518172, China |
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| Abstract: | A laser alignment measurement method based on a focusing objective and PSD is proposed in order to solve the problem of mathematical model in traditional laser alignment method, which is complex and difficult to work out. Misalignment angle deviation and position deviation are acquired using relations between field of view and focal length of the optical system, and the principle of similar triangle. The measurement principle is simple and easy solving. The experiment results show that when position measurement range is 0.5 mm~1.5 mm and angle measurement range is 0.047 7°~0.143 2°, accuracy of position deviation measurement and angle deviation measurement are 0.035 mm~0.207 mm and 0.000 2°~0.012 8° respectively. Finally, error of accuracy is analyzed and a method considered for eliminating influence of installation error is proposed, and a theoretical formula is given. |
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