| 形貌与微变形全场光学同时测量方法 |
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| 引用本文： | 蒋艳鹏,吴思进,杨连祥.形貌与微变形全场光学同时测量方法[J].应用光学,2017,38(1):67-71. |
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| 作者姓名： | 蒋艳鹏 吴思进 杨连祥 |
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| 作者单位： | 1.北京信息科技大学 仪器科学与光电工程学院, 北京 100192 |
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| 基金项目： | 北京市教育委员会科技计划面上项目KM201511232004国家自然科学基金项目51275054 |
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| 摘 要： | 在实际工程应用中，对材料形貌和结构变形等参量的检测是必不可少的，而且往往需要进行多参量同时测量。针对该背景，采用数字散斑干涉与数字条纹投影相结合的测量方法, 设计了一种集成光路，通过在数字散斑干涉实验光路中引入一个投影设备，实现物体表面形貌和微变形的同时测量。所提出的方法具有全场非接触测量的优点，且测量光路简单、操作方便、效率高、可靠性强。该方法的形貌测量分辨率优于10 μm，形变测量分辨率优于30 nm。
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| 关 键 词： | 数字散斑干涉 数字条纹投影 形貌 微变形 |
| 收稿时间： | 2016-07-04 |
Simultaneous measurement of contour and micro-deformation using full-field optical methods |
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| Affiliation: | 1.College of Instrument Science and Opto-electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China2.Department of Mechanical Engineering, Oakland University, Rochester 48309, USA |
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| Abstract: | In practical engineering applications, contour and micro-deformation of materials and structures are essential parameters to be tested, and furthermore, usually need to be tested simultaneously. To meet this requirement, a method that combines digital speckle pattern interferometry (DSPI) and digital fringe projection (DFP) is proposed. An integrated optical setup is built by embedding a digital projector in the DSPI setup. With the new setup, surface contours and deformations can be measured simultaneously. The proposed method has the advantages of full-field, non-contact measurement, simple optical arrangement, ease of operation, high efficiency and reliability. The resolution of contour measurement is up to 10 μm, while the deformation measurement resolution is up to 30 nm. |
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