Room temperature NO_2 gas sensing of Au-loaded tungsten oxide nanowires/porous silicon hybrid structure |
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| Affiliation: | School of Electronics and Information Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | In this work, we report an enhanced nitrogen dioxide (NO2) gas sensor based on tungsten oxide (WO3) nanowires/porous silicon (PS) decorated with gold (Au) nanoparticles. Au-loaded WO3 nanowires with diameters of 10 nm-25 nm and lengths of 300 nm-500 nm are fabricated by the sputtering method on a porous silicon substrate. The high-resolution transmission electron microscopy (HRTEM) micrographs show that Au nanoparticles are uniformly distributed on the surfaces of WO3 nanowires. The effect of the Au nanoparticles on the NO2-sensing performance of WO3 nanowires/porous silicon is investigated over a low concentration range of 0.2 ppm-5 ppm of NO2 at room temperature (25 ℃). It is found that the 10-Å Au-loaded WO3 nanowires/porous silicon-based sensor possesses the highest gas response characteristic. The underlying mechanism of the enhanced sensing properties of the Au-loaded WO3 nanowires/porous silicon is also discussed. |
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| Keywords: | Au-loaded WO3 nanowires hybrid structure gas sensing |
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