An efficient numerical approach to electrostatic microelectromechanical system simulation |
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| Authors: | Li Pu |
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| Affiliation: | College of Mechanical Engineering, Southeast University, Nanjing 211189, China |
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| Abstract: | Computational analysis of electrostatic
microelectromechanical systems (MEMS) requires an electrostatic
analysis to compute the electrostatic forces acting on
micromechanical structures and a mechanical analysis to compute the
deformation of micromechanical structures. Typically, the mechanical
analysis is performed on an undeformed geometry. However, the
electrostatic analysis is performed on the deformed position of
microstructures. In this paper, a new efficient approach to
self-consistent analysis of electrostatic MEMS in the small
deformation case is presented. In this approach, when the
microstructures undergo small deformations, the surface charge
densities on the deformed geometry can be computed without updating
the geometry of the microstructures. This algorithm is based on the
linear mode shapes of a microstructure as basis functions. A boundary
integral equation for the electrostatic problem is expanded into a
Taylor series around the undeformed configuration, and a new
coupled-field equation is presented. This approach is validated by
comparing its results with the results available in the literature
and ANSYS solutions, and shows attractive features comparable to
ANSYS. |
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| Keywords: | microelectromechanical systems self-consistent boundary
element method |
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