| 非零位检测凸非球面反射镜的研究 |
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| 引用本文： | 王孝坤.非零位检测凸非球面反射镜的研究[J].应用光学,2012,33(1):124-128. |
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| 作者姓名： | 王孝坤 |
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| 作者单位： | 1.中国科学院长春光学精密机械与物理研究所,吉林长春130033 |
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| 基金项目： | 863基金资助项目(O8663NJ090)；中国科学院长春光学精密机械与物理研究所创新三期基金资助项目(NO：O83Y32J080) |
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| 摘 要： | 在简要总结各种检测凸非球面方法优缺点的基础上，提出了利用部分补偿法和子孔径拼接干涉检测凸非球面的新方法。分别研究和分析了这两种非零位检测非球面方法的基本原理和基础理论；设计并制作了部分补偿器件，并对其系统误差进行了标定；开发了综合优化和误差均化的子孔径拼接算法；设计并研制了两种方法都适用的检测装置。并结合实例对一口径为130 mm的碳化硅凸非球面分别进行了部分补偿检测和子孔径拼接测量，这两种方法测量所得的全口径面形分布是一致的，其PV值和RMS值的偏差仅为0.010 和 0.002 (=0.632 8 m)。从而提供了两种非零位补偿测试凸非球面的手段。
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| 关 键 词： | 非零位检测 部分补偿 子孔径拼接干涉 凸非球面 零位补偿 |
| 收稿时间： | 2010/11/23 |
Measurement of convex aspheric mirror by non-null testing |
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| WANG Xiao-kun.Measurement of convex aspheric mirror by non-null testing[J].Journal of Applied Optics,2012,33(1):124-128. |
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| Authors: | WANG Xiao-kun |
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| Affiliation: | 1.Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China |
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| Abstract: | Conventional testing methods for convex aspheric surfaces were briefly reviewed, and two novel methods for testing convex asphere by partial compensation method and sub-aperture stitching interferometry (SSI) were proposed. The basic principle and theory of the two methods were investigated. The partial compensator was designed and customized, the system error of the partial compensator was calibrated, and the synthetical optimization stitching model and the effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The prototype and setup for testing of convex asphere by the non-null testing were developed. A convex SiC asphere with the aperture of 130 mm was tested by the two methods respectively. The results show that the difference of PV and RMS error between SSI and partial compensation is 0.010 λ and 0.002 λ respectively, the full aperture surface maps of the two methods are consistent and it provides two non-null testing methods for measuring convex aspheric surfaces. |
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| Keywords: | non-null testing partial compensation SSI convex asphere null compensation |
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