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| 气压对微束射频容性放电模式调制的研究 | |
| 引用本文： | 黄就欢,高飞,王友年. 气压对微束射频容性放电模式调制的研究[J]. 物理学报, 2021, 0(7): 238-245 |
| 作者姓名： | 黄就欢 高飞 王友年 |
| 作者单位： | 大连理工大学物理学院 |
| 基金项目： | 国家自然科学基金(批准号:11675039,12075049);中央高校基本科研业务费专项资金(批准号:DUT18TD06,DUT20LAB201)资助的课题. |
| 摘 要： | 微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99％氩/1％氢混合气体微束射频放电中,丝状放电模式消失,而是... |
| 关 键 词： | 微束射频容性放电 实验诊断 放电模式转换 |
Effect of pressure on discharge mode transition in radiofrequency capacitively coupled micro-beam plasmas |
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| Huang Jiu-Huan,Gao Fei,Wang You-Nian. Effect of pressure on discharge mode transition in radiofrequency capacitively coupled micro-beam plasmas[J]. Acta Physica Sinica, 2021, 0(7): 238-245 | |
| Authors: | Huang Jiu-Huan Gao Fei Wang You-Nian |
| Affiliation: | (Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,China) |
| Abstract: | Micro-beam radio-frequency(RF)capacitive discharges have been widely used in the plasma enhanced chemical vapor deposition of nanocrystalline particles such as nano silicon crystal.However,the plasma column shrinks radially at a sufficiently high gas pressures as manifested by their glow not entirely filling the radial cross-section of the discharge tube.This greatly limits the dissociation rate of gas in plasma.In order to obtain the information about the plasma column varying with gas pressure,the formation of different gas discharge mode under different pressure is discussed.In this paper the spatial characteristics of micro-beam RF capacitive discharges are investigated by using an intensified charged-coupled device(ICCD)and a single lens reflex camera(SLR camera).Furthermore,high voltage probe and current probe are used to record the electrical characteristics of the high voltage electrode.The results indicate that in a pure argon discharge,the discharge mode evolves from a glow discharge into a filament discharge with the increase of pressure.As the pressure continues to increase,the filament is split:a single channel of plasma is split into two or more filaments at a certain gas pressure.However,the glow discharge in a mixture of 99%argon and 1%hydrogen at a low pressure is observed:the plasma spreads throughout the tube.As the pressure increases,the filament disappears,and the plasma column still can be observed in the center of quartz tube.The glow shrinks in the radial center at a moderate pressure.At a high pressure,the"annulus"glow discharge is achieved as manifested by a glow ring on the surface of the discharge tube.In addition,in pure hydrogen discharges,the discharge mode evolves from the full-space glow discharge into an"annulus"glow discharge with pressure increasing.Finally,through the interaction between the electron heating by the radio frequency electric field and heat conduction of gas,the filament discharge in a low thermal conduction gas is explained.In addition,special attention is paid to the pure argon filamentation,which is the splitting of a single channel of plasma into two or more smaller filaments as a result of the skin effect. |
| Keywords: | radio-frequency capacitively coupled micro-beam plasmas experimental diagnoses mode transition |
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