| 六方氮化硼层间气泡制备与压强研究 |
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| 引用本文： | 姜程鑫,陈令修,王慧山,王秀君,陈晨,王浩敏,谢晓明.六方氮化硼层间气泡制备与压强研究[J].物理学报,2021(6):372-378. |
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| 作者姓名： | 姜程鑫 陈令修 王慧山 王秀君 陈晨 王浩敏 谢晓明 |
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| 作者单位： | 上海科技大学物质学院;中国科学院上海微系统与信息技术研究所;中国科学院大学材料科学与光电技术学院;中国科学院超导电子学卓越创新中心 |
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| 基金项目： | 国家重点研发计划(批准号:2017YFF0206106);国家自然科学基金(批准号:51772317,91964102);中国科学院战略性先导科技专项(B类)(批准号:XDB30000000);上海市“超级博士后”和中国博士后科学基金(批准号:2019T120366,2019M651620)资助的课题. |
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| 摘 要： | 六方氮化硼(h-BN)具有六角网状晶格结构和高化学机械稳定性,可以用来封装气体并长期保持稳定,适合用作新型信息器件及微纳机电器件的衬底材料,具有巨大的应用前景.近期,科研人员发现氢原子可以无损穿透多层h-BN,在层间形成气泡,可用作微纳机电器件.本文研究了氢等离子体处理时间对h-BN气泡尺寸的影响.发现随着处理时间的延长,气泡尺寸整体变大且分布密集程度会降低.原子力显微镜的测量发现所制备的h-BN气泡具有相似的形貌特征,该特征与h-BN的杨氏模量和层间范德瓦耳斯作用相关.此外,发现微米尺寸气泡的内部压强约为1—2 MPa,纳米尺寸气泡的内部压强可达到GPa量级.
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| 关 键 词： | 六方氮化硼 等离子体处理 纳米气泡 范德瓦耳斯异质结 |
Synthesis and pressure study of bubbles in hexagonal boron nitride interlayer |
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| Jiang Cheng-Xin,Chen Ling-Xiu,Wang Hui-Shan,Wang Xiu-Jun,Chen Chen,Wang Hao-Min,Xie Xiao-Ming.Synthesis and pressure study of bubbles in hexagonal boron nitride interlayer[J].Acta Physica Sinica,2021(6):372-378. |
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| Authors: | Jiang Cheng-Xin Chen Ling-Xiu Wang Hui-Shan Wang Xiu-Jun Chen Chen Wang Hao-Min Xie Xiao-Ming |
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| Affiliation: | (School of Physical Science and Technology,ShanghaiTech University,Shanghai 200031,China;State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China) |
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| Abstract: | Hexagonal boron nitride(h-BN)is considered as an ideal substrate material for new electronic devices and nano-electromechanical(NEMS)devices,owing to its hexagonal network lattice structure and high chemical and mechanical stability.It can be used to seal gas with a long-term stability,and then has a big potential in further applications in electronics and NEMS.Recently,researchers have discovered that hydrogen atoms can penetrate multiple layers of h-BN non-destructively,forming the bubbles between layers,which can be used as NEMS devices.In this article,we investigate the effect of hydrogen plasma treatment duration on the size of h-BN bubbles.It is found that the size of bubbles becomes larger with the increase of treatment time while their distribution density decreases.It is also observed that the prepared h-BN bubbles have similar morphological characteristics,which are related to Young’s modulus of h-BN and interlayer van der Waals interaction.With the help of force-displacement curve measurement,it is obtained that the internal pressure is about 1-2 MPa for micro-sized bubbles,while the internal pressure of nano-sized bubbles can reach a value of GPa. |
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| Keywords: | h-BN plasma treatment nano bubbles van der Waals heterostructure |
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