Angular broadening in core‐electron spectroscopy |
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| Authors: | Alon Givon Hagai Cohen |
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| Affiliation: | 1. Department of Materials and Interfaces, Weizmann Institute of Science, Rehovot, Israel;2. Department of Chemical Research Support, Weizmann Institute of Science, Rehovot, Israel |
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| Abstract: | The role of angular broadening in quantitative core‐electron spectroscopy is investigated using an analytic approach. It is shown why, practically, this effect remains relatively small for a broad range of parameters. A correction factor is derived, suggesting that the replacement of inelastic mean free path by an effective attenuation‐length parameter is not necessarily an optimal choice. The derived expression further proposes useful insight on the contribution of leading experimental parameters and, in particular, on the sharp increase of elastic‐scattering corrections above a (depth dependent) critical angle. Copyright © 2015 John Wiley & Sons, Ltd. |
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| Keywords: | XPS angle‐resolved XPS angular broadening attenuation‐length quantitative surface analysis |
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