Abstract:The spectral light source is the center of spectral instrument and spectral technology,the plasma light source is one of the active fields of atomic emission spectroscopy technology, inductively coupled plasma（ICP） light source has been successfully applied to atomic emission spectrometry and inorganic mass spectrometry. Becauseuseargon as working gas at Ar-ICP source and the argonconsumption is larger, so reduce the dosage of argon become the important goals ofresearch and improvement of the atomic spectrum technology in recent years.For this purpose, a variety of spectral light sources werestudied,included the argon ICP source of various low argon ICP source, the microwave plasma source (MIP,MPT) and radio frequency (rf) capacitively coupled plasma source(CCP) etc. In this paper, the structures, properties and characteristics of these plasma emission light sources werereviewed. It is also togeneralize andsummarizethat the evaluation of various plasma emission spectral light sources should includethe plasma temperature (excitation temperature Texc, gas temperature Tg), electron density, the type of working gas and amounts of gas, detection limits of elements, robustness of light sourcesand economical aspects etc.