摘要: 采用LPMOCVD技术生长了InGaAs红外探测器器件结构材料,其晶格失配为2.19×10-4.利用锌扩散制备探测器单元器件,光谱响应范围为0.90~1.70μm,在1.95V偏压下,暗电流为5.75×10-5A,在反向偏压为-5V时,电容为6.96×10-12F.探测器波段探测率为2.08×1011cmHz1/2W-1.
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缪国庆;殷景志;金亿鑫;蒋红;张铁民;宋航. 非致冷In0.53Ga0.47 As/InP红外探测器研究[J]. 人工晶体学报, 2005, 34(6): 1056-1058.
MIAO Guo-qing;YIN Jing-zhi;JIN Yi-xin;JIANG Hong;ZHANG Tie-min;SONG Hang. Study on Uncooled In0.53 Ga0.47As/InP Infrared Detectors[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2005, 34(6): 1056-1058.