TABOR NUMBER, ADHESION PARAMETER AND ELASTIC THEORY OF MICROSCALE ADHESIVE CONTACT
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摘要: 微电子机械系统（ＭＥＭＳ）等领域的飞速发展，促使我们迈进了一个表面效应在许多现象 中占主导地位的研究领域．本文重点介绍在ＭＥＭＳ中经常遇到的微尺度粘着弹性接触的相关理论． 通过对两个无量纲数——Ｔａｂｏｒ数μ（以及其相应形式）和粘着数θ的分析，以及考虑它们对于粘 着力的影响，指出了粘着弹性接触理论中所隐含的尺度效应，随着特征尺度的减小，粘着弹性接触中 的表面效应愈加明显．Abstract: The rapid development of micro-electro-mechanical systems (MEMS) and some other related fields allows us to venture into a research area in which the surface effects dominate most of the phenomena. This paper introduces the microscale elastic theory of adhesive contact, which is often encountered in MEMS fabrication. By analyzing two dimensionless parameters, Tabor number and adhesion parameter, and their influence on adhesive forces, we point out the scale effect that is implicit in the existing adhesive e...
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Key words:
- MEMS /
- scale effect /
- surface effect /
- microscale adhesive contact /
- Tabor number /
- adhesion parameter /
- wafer bondint
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