Fig. 1

(Color online) (a) 3D diagram of structure with 67 nm flat Si$_{3}$N$_{4}$ used as a control group for optimization of texture parameter using simulation. (b) 3D diagram of structure with Si$_{3}$N$_{4}$ CTCs arrays used for optimization of texture parameter using simulation. (c) 3D diagram of structure with Si$_{3}$N$_{4}$ CTCs arrays and back silver reflector used for optimization of texture parameter using simulation. (d) Schematic of the FDTD simulation model in Fig. 1(b). PML perfectly matched layer, PBC periodic boundary condition."

Fig. 2

(Color online) Relationship of ${J}_{\rm sc}$ under different combinations of $t_{\text{dc}}$ and $b_{\text{dc}}$ in different period. (a) ${P} = 500$ nm, (b) ${P} = 600$ nm, (c) ${P} = 700$ nm, (d) ${P} = 800$ nm."

Fig. 3

(Color online) (a) Relationship between ${J}_{\rm sc}$ and ${H}_{3}$ at different ${H}_{1}$. (b). Absorption spectrum for Si with different ${H}_{3}$. (40 nm, 50 nm not shown here because the lines are too dense)."

Fig. 4

(Color online) (a) Relationship between ${J}_{\rm sc}$ and thickness of back silver. (b) Comparison of absorption spectra for different configurations. Blue line means the absorption spectrum equipped with 67 nm flat ${\rm Si_{3}N_{4}}$. Red line means the absorption spectrum only with front system. Black line means the absorption spectrum with front system and back flat silver reflector. Green line means the absorption spectrum of bare silicon."

Fig. 5

(Color online) Two-dimensional light absorption density distribution profiles of the silicon part in our solar cell at a wavelength of 600 nm of $x$-$z$ cross-section. (a) The structure of control group corresponds to Fig. 1(a). (b) The structure with Si$_{3}$N$_{4}$ CTCs arrays corresponds to Fig. 1(b). (c) The structure with Si$_{3}$N$_{4}$ CTCs arrays and back silver reflector corresponds to Fig. 1(c). (d) Comparison of the short-circuit currents generated by the three structures (red bars) corresponding to Figs. 1(a)--1(c), the bare silicon (black dashed line)."

Fig. 6

(Color online) ${J}_{\rm sc}$ enhancement of different thickness (2330 nm, 2500 nm, 5000 nm, 10000 nm) of silicon solar cell with and without optimized structure."