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王家明,李宇龙,王宏章,徐铁权,马平,王越.基于LSAT 衬底 YBa2Cu3O7-δ 台阶结的射频高温超导量子干涉器的制备和表征[J].低温物理学报,2021,(2):89-97. [点击复制]
- WANG Jiaming,LI Yulong,WANG Hongzhang,XU Tiequan,MA Ping,WANG Yue.Fabrication and Characterization of YBa2Cu3O7-δ Radio Frequency SQUIDs with Step-edge Josephson Junctions on LSAT Substrates[J].LOW TEMPERATURE PHYSICAL LETTERS,2021,(2):89-97. [点击复制]
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| 基于LSAT 衬底 YBa2Cu3O7-δ 台阶结的射频高温超导量子干涉器的制备和表征 |
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王家明1, 李宇龙2, 王宏章3, 徐铁权4, 马平5, 王越6
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| (1.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100871;2.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100872;3.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100873;4.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100874;5.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100875;6.北京大学物理学院, 北京大学应用超导研究中心, 人工微结构和介观物理国家重点实验室, 北京 100876) |
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| 摘要: |
| 基于 YBa2Cu3 O7 -δ (YBCO) 台阶边沿型约瑟夫森结( 台阶结) 的高温超导量子干涉器(Superconducting Quantum Interference Device, 简称 SQUID) 在微弱磁场测量等领域具有重要应用价值. 制 备 YBCO 台 阶 结 及SQUID 的常用单晶衬底包括 LaAlO3 (LAO) 、SrTiO3 (STO) 及 MgO 等. (La0 .3 ,Sr0 .7 ) (Al0 .65 ,Ta0 .35 )O3 (LSAT) 没有孪晶现象、 与 YBCO 的晶格失配度很小(仅为0.4% ) , 有潜力成为制备 YBCO 台阶结及相应的高温超导 SQUID器件的新的衬底选择. 本文首次探索研究了 LSAT 衬底上 YBCO 台阶结型射频超导量子干涉器(rf SQUID) 的制备和表征. 采用氩离子束刻蚀技术在 LSAT(100) 衬底上制备角度约为46°的台阶, 利用脉冲激光沉积法在衬底上生长 YBCO 超导薄膜, 然后利用传统紫外光刻技术制备出高温超导rf SQUID 器件. 在温度为77 K 时, 器件测试观察到幅度较大的电压-磁通特性曲线, 且在部分器件的特性曲线中观察到接近方波的非传统波形, 表明器件工作于噪声较低的色散模式下. 频率1 kHz 时器件的磁通噪声约为20 μΦ0/Hz1/2 , 与文献中报道的 LAO、STO 衬底上台阶结型SQUID 器件的典型结果相当. 本工作展示了利用 LSAT 衬底制备低噪声台阶结型rf SQUID 器件的可行性, 并为进一步研制该衬底上更高性能的高温超导SQUID 器件奠定了基础 |
| 关键词: YBa2Cu3 O7 -δ , 台阶结, 超导量子干涉器,LSAT |
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| Fabrication and Characterization of YBa2Cu3O7-δ Radio Frequency SQUIDs with Step-edge Josephson Junctions on LSAT Substrates |
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WANG Jiaming1, LI Yulong2, WANG Hongzhang3, XU Tiequan4, MA Ping5, WANG Yue6
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| (1.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100871, China;2.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100872, China;3.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100873, China;4.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100874, China;5.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100875, China;6.State Key Laboratory for Mesoscopic Physics , Applied Superconductivity Center , School of Physics , Peking University , Beijing 100876, China) |
| Abstract: |
| YBa2Cu3 O7 -δ ( YBCO ) superconducting quantum interference devices (SQUIDs ) with step-edge junctions (SEJs) have many important applications in detection of various weak magnetic signals. (La0 .3 ,Sr0 .7 )(Al0 .65 ,Ta0 .35 )O3 (LSAT) , having very close lattice match with YBCO and no twinning property, is a prospective substrate to be employed in the fabrication of YBCO SEJ SQUIDs, besides the commonly-used substrates like LaAlO3 (LAO) and SrTiO3 (STO) . In this paper we explored for the first time the fabrication and characterization of YBCO SEJ SQUIDs on LSAT (100 ) substrate. Steps showing an edge angle of about 46° were produced on LSAT substrate by an argon ion beam milling. With subsequent pulsed-laser deposition of YBCO thin film and conventional photolithography, radiofrequency (rf) SQUIDs were fabricated. At77 K, the device works in then on hysteretic regime with recommended conditions fulfilled, as indicated by the nearly rectangular waveform of the voltage-flux characteristics. The magnetic flux noise of the device is about 20 μΦ0/Hz1/2 at 1 kHz, comparable to the values as typically reported for devices on LAO and STO substrates. The present results demonstrate the feasibility of fabricating low-noise rf SQUIDs with YBCO SEJs on LSAT substrate. |
| Key words: YBa2Cu3 O7 -δ , step-edge junction, superconducting quantum interference device, LSAT |
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